ALD Film

  • High-k dielectrics (AI2O3, HfO2, ZrO2, Ta2O5, La2O3)
    Transistor gates, DRAM capacitors
    Organic transistors, Graphene, Graphite, Nano-tubes, Nano-wires, Molecular electronics
  • Conductive gate electrodes (Ir, Pt, Ru, TiN, TaN)
  • buy Pregabalin online eu Metal interconnects and liners (Cu, WN, TaN, WNC, Ru, Ir)
    Metallic diffusion barrier layers for Cu interconnects and semiconductor vias transistor gate and memory cell applications, Passivation layers
  • Catalytic materials (Pt, Ir, Co, TiO2, V2O5)
    Coatings inside filters, membranes, Catalysts, Fuel cells ion exchange coatings
  • Nanostructures
    Conformal deposition around and inside nanostructures and MEMS
  • Biomedical coatings: (TiN, ZrN, CrN, TiAlN, AlTiN)
    Biocompatible materials for in-vivo medical devices and instruments
  • ALD metals(Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni)
  • Transparent electrical conductors (ZnO:Al, ITO)
  • UV blocking layers (ZnO, TiO2)
  • OLED passivation (Al203)
  • Solid lubricant layers (WS2)
  • Photonic crystals (ZnO, ZnS:Mn, TiO2, Ta2N5)
    Coatings inside porous alumina, inverted opals
  • Anti-reflection and optical filters (Al2O3, ZnS, SnO2, Ta2O5)
    Fabry-Perot, Rugate, Flip-Flop optical filters
  • Electrolminescent devices (SrS:Cu, ZnS:Mn, ZnS:Tb, SrS:Ce)
  • Processing layers(Al2O3, ZrO2)
    Etch barriers, ion diffusion barrlers, fill layers for magnetic read heads
  • Optical applications(AlTiO, SnO2, ZnO)
    Photonics, Nano-photonics, Solar cells, Integrated Optical coatings, Lasers, Variable dielectric constant nano-laminates
  • Sensors (SnO2, Ta2O5)
    Gas sensors, pH sensors
  • Wear and corrosion inhibiting layers (Al2O3, ZrO2)