ALD Film

  • High-k dielectrics (AI2O3, HfO2, ZrO2, Ta2O5, La2O3)
    Transistor gates, DRAM capacitors
    Organic transistors, Graphene, Graphite, Nano-tubes, Nano-wires, Molecular electronics
  • Conductive gate electrodes (Ir, Pt, Ru, TiN, TaN)
  • Metal interconnects and liners (Cu, WN, TaN, WNC, Ru, Ir)
    Metallic diffusion barrier layers for Cu interconnects and semiconductor vias transistor gate and memory cell applications, Passivation layers
  • Catalytic materials (Pt, Ir, Co, TiO2, V2O5)
    Coatings inside filters, membranes, Catalysts, Fuel cells ion exchange coatings
  • Nanostructures
    Conformal deposition around and inside nanostructures and MEMS
  • Biomedical coatings: (TiN, ZrN, CrN, TiAlN, AlTiN)
    Biocompatible materials for in-vivo medical devices and instruments
  • ALD metals(Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni)
  • Transparent electrical conductors (ZnO:Al, ITO)
  • UV blocking layers (ZnO, TiO2)
  • OLED passivation (Al203)
  • Solid lubricant layers (WS2)
  • Photonic crystals (ZnO, ZnS:Mn, TiO2, Ta2N5)
    Coatings inside porous alumina, inverted opals
  • Anti-reflection and optical filters (Al2O3, ZnS, SnO2, Ta2O5)
    Fabry-Perot, Rugate, Flip-Flop optical filters
  • Electrolminescent devices (SrS:Cu, ZnS:Mn, ZnS:Tb, SrS:Ce)
  • Processing layers(Al2O3, ZrO2)
    Etch barriers, ion diffusion barrlers, fill layers for magnetic read heads
  • Optical applications(AlTiO, SnO2, ZnO)
    Photonics, Nano-photonics, Solar cells, Integrated Optical coatings, Lasers, Variable dielectric constant nano-laminates
  • Sensors (SnO2, Ta2O5)
    Gas sensors, pH sensors
  • Wear and corrosion inhibiting layers (Al2O3, ZrO2)