cn1_sliderPR_01

Atomic-Shell

Rotating reactor ALD for shell coating on core structure

  • Nano size powder coating system
  • Reactor volume : > 100cc
  • Filter size : Variable(from 0.5µm~)
  • Horizontal rotation system
  • Precursor canister : 4EA
  • Process temperature : R.T. ~ 350°C (Reactor body : 230°C)
  • Reactor rotation : DC Motor
  • Rotation speed : 10 ~ 120rpm
  • Base pressure : under 20mTorr
  • Application : Coating on particle, wire, tube, etc.
Atomic-Shell