ALD

ALD Film

  • High-k dielectrics
  • (AI2O3, HfO2, ZrO2, Ta2O5, La2O3)
  • Transistor gates, DRAM capacitors
  • Organic transistors, Graphene, Graphite, Nano-tubes, Nano-wires, Molecular electronics
  • Conductive gate electrodes
  • (Ir, Pt, Ru, TiN, TaN)
  • Metal interconnects and liners
  • (Cu, WN, TaN, WNC, Ru, Ir)
  • Metallic diffusion barrier layers for Cu interconnects and semiconductor vias transistor gate and
    memory cell applications, Passivation layers
  • Catalytic materials
  • (Pt, Ir, Co, TiO2, V2O5)
  • Coatings inside filters, membranes, Catalysts, Fuel cells ion exchange coatings
  • Nanostructures
  • Conformal deposition around and inside nanostructures and MEMS
  • Biomedical coatings
  • (TiN, ZrN, CrN, TiAlN, AlTiN)
  • Biocompatible materials for in-vivo medical devices and instruments
  • ALD metals
  • (Ru, Pd, Ir, Pt, Rh, Co, Cu, Fe, Ni)
  • Transparent electrical conductors
  • (ZnO:Al, ITO)
  • UV blocking layers
  • (ZnO, TiO2)
  • OLED passivation
  • (Al203)
  • Solid lubricant layers
  • (WS2)
  • Photonic crystals
  • (ZnO, ZnS:Mn, TiO2, Ta2N5)
  • Coatings inside porous alumina, inverted opals
  • Anti-reflection and optical filters
  • (Al2O3, ZnS, SnO2, Ta2O5)
  • Fabry-Perot, Rugate, Flip-Flop optical filters
  • Electrolminescent devices
  • (SrS:Cu, ZnS:Mn, ZnS:Tb, SrS:Ce)
  • Processing layers
  • (Al2O3, ZrO2)
  • Etch barriers, ion diffusion barrlers, fill layers for magnetic read heads
  • Optical applications
  • (AlTiO, SnO2, ZnO)
  • Photonics, Nano-photonics, Solar cells, Integrated Optical coatings, Lasers, Variable dielectric
    constant nano-laminates
  • Sensors
  • (SnO2, Ta2O5)
  • Gas sensors, pH sensors
  • Wear and corrosion inhibiting layers
  • (Al2O3, ZrO2)